Alo o le Silicon Carbide Cantilevers
Oloa auiliiliina ma talosaga
Lautele wafer utaina malosiaga silicon karbide SiSiC / SiC cantilever foe / utupoto e talafeagai mo se ropota otometi utaina ma taulimaina faiga aua o lo o mautu faatinoga, leai-deformation i le maualuga vevela ma lapoʻa wafer utaina malosiʻaga. Talu ai o le vaega o le cantilever foe e mautu ma e leai se deformation, e mafai ai ona faia lapopoʻa lapoʻa areto faʻaaogaina o lo oi ai nei ogaumu ogaumu. E mafai ona faʻaoga le kapeti lapopoʻa a le silica karbide SiSiC / SiC i le LPVCD i luga ole faʻavae o le faʻaopopoga o le vevela faʻatasi ma le ufiufi o le LPVCD, e faʻaumiumi ai le faʻataʻitaʻiga ma le faʻamamaina ole taamilosaga.
Tapulaʻa faʻatulagaina o tali faʻafesoʻotaʻi silicon carbide RBSIC:
| aitema | iunite | faʻamaumauga |
| Vevela o le talosaga | ℃ | 1380 |
| lapoʻa | G / cm3 | > = 3.02 |
| Tatala porosity | % | <0.1 |
| Moh's Scale of Hardness | 13 | |
| Punou malosi | Mpa | 250 (20 ℃) |
| Mpa | 280 (1200 ℃) | |
| Modulus o ofuvae | Gpa | 330 (20 ℃) |
| Gpa | 300 (1200 ℃) | |
| Avea vevela | W / mk | 45 (1200 ℃) |
| Coefficient o faʻalautelega vevela | K-1 * 10-6 | 4.5 |
| Alkal-faamaoniga alkaline | Sili ona lelei |
Vaega:
a. E le deform i le maualuga vevela ma o le wafer utaina malosiʻaga e tele;
e. Lelei sili atu teteʻi vevela vevela ma umi le ola tautua;
i. O le mafanafana faʻalauteleina coefficient o le cantilever foe e matua laitiiti, lea e faʻaumiumi ai le tausiga ma le faʻamamaina taʻamilosaga;
ma matua faʻaititia le faʻaleagaina
Isi kiln meaafale faia e le silicon karbide keramika
E ese mai i le tali atu o le silicon carbide SiSiC cantilever foe mo le teuina o areto, tatou te gaosia foi isi kiln meaafale e aofia ai utupoto RBSIC / SISIC silicon carbide, paipa o le au, faapipii au o le faagaau, taavili au o le faagaau, paʻu uʻamea sooga SIC silicon carbide batts / setter plate ma RBSIC paipa malulu .
Laʻau teteʻe RBSIC / SISIC oloa silicon karbitide
Talu ai o la matou RBSIC / SISIC silicon carbide oloa o loʻo iai le faʻamanuiaga o le sili atu ona lelei le teteʻe, o le pala ma le umi o le olaga tautua, e mafai foi ona faia e fai ai laei e ufiufi laina e mafai ona faigofie ona faʻapipiʻi i le faʻagaioia o paipa poʻo afa.
